APA (7th ed.) Citation

T. Hsu. MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering, 2nd Edition.

Chicago Style (17th ed.) Citation

T. Hsu. MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering, 2nd Edition.

MLA (9th ed.) Citation

T. Hsu. MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering, 2nd Edition.

Warning: These citations may not always be 100% accurate.