T. Hsu. MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering, 2nd Edition.
Chicago Style (17th ed.) CitationT. Hsu. MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering, 2nd Edition.
MLA (9th ed.) CitationT. Hsu. MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering, 2nd Edition.
Warning: These citations may not always be 100% accurate.