Madou, M. J. (2012). Fundamentals of microfabrication and nanotechnology (Third edition.). CRC Press.
Chicago Style (17th ed.) CitationMadou, Marc J. Fundamentals of Microfabrication and Nanotechnology. Third edition. Boca Raton, FL: CRC Press, 2012.
MLA (9th ed.) CitationMadou, Marc J. Fundamentals of Microfabrication and Nanotechnology. Third edition. CRC Press, 2012.
Warning: These citations may not always be 100% accurate.