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Fundamentals of microfabrication and nanotechnology

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Bibliographic Details
Main Author: Madou, Marc J. (Author)
Format: Book
Language:English
Published: Boca Raton, FL CRC Press 2012
Edition:Third edition
Subjects:
Microelectronics
Integrated circuits > Design and construction
Microelectromechanical systems > design and construction
Machining
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Description
Physical Description:3 volume illustrations (some color) 29 cm
Bibliography:Includes bibliographical references and index
ISBN:9780849331800 (set)
9781420055115 (vol. 1)
9781420055191 (vol. 2)
9781420055160 (vol. 3)

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