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|a 9780849331800 (set)
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| 020 |
|
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|a 9781420055115 (vol. 1)
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| 020 |
|
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|a 9781420055191 (vol. 2)
|
| 020 |
|
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|a 9781420055160 (vol. 3)
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| 039 |
|
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|a 202211041251
|b VLOAD
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|d rafizah
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|a MY-KlNDU
|b eng
|c MY-KlNDU
|e rda
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| 050 |
|
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|a TK 7875
|b .M32 2012
|
| 090 |
|
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|a TK 7875
|b .M32 2012
|
| 100 |
1 |
|
|a Madou, Marc J.
|e author
|
| 245 |
1 |
0 |
|a Fundamentals of microfabrication and nanotechnology
|c Marc J. Madou
|
| 250 |
|
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|a Third edition
|
| 264 |
|
1 |
|a Boca Raton, FL
|b CRC Press
|c 2012
|
| 264 |
|
4 |
|c © 2012
|
| 300 |
|
|
|a 3 volume
|b illustrations (some color)
|c 29 cm
|
| 336 |
|
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|a text
|2 rdacontent
|
| 337 |
|
|
|a unmediated
|2 rdamedia
|
| 338 |
|
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|a volume
|2 rdacarrier
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| 504 |
|
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|a Includes bibliographical references and index
|
| 505 |
0 |
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|a volume 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- volume 2. Manufacturing techniques for microfabrication and nanotechnology -- volume 3. From MEMS to bio-MEMS and bio-NEMS: manufacturing techniques and applications.
|
| 592 |
|
|
|a 40483
|b 6/9/2021
|c RM 1289.05 (set)
|h Bookline
|
| 650 |
|
0 |
|a Microelectronics
|
| 650 |
|
0 |
|a Integrated circuits
|x Design and construction
|
| 650 |
|
0 |
|a Microelectromechanical systems
|x design and construction
|
| 650 |
|
0 |
|a Machining
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