Fundamentals of microfabrication and nanotechnology

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Bibliographic Details
Main Author:	Madou, Marc J. (Author)
Format:	Book
Language:	English
Published:	Boca Raton, FL CRC Press 2012
Edition:	Third edition
Subjects:	Microelectronics Integrated circuits > Design and construction Microelectromechanical systems > design and construction Machining
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Table of Contents:

volume 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
volume 2. Manufacturing techniques for microfabrication and nanotechnology
volume 3. From MEMS to bio-MEMS and bio-NEMS: manufacturing techniques and applications.

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