Fundamentals of microfabrication and nanotechnology

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Bibliographic Details
Main Author:	Madou, Marc J. (Author)
Format:	Book
Language:	English
Published:	Boca Raton, FL CRC Press 2012
Edition:	Third edition
Subjects:	Microelectronics Integrated circuits > Design and construction Microelectromechanical systems > design and construction Machining
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