Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS
This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, d...
Saved in:
| Other Authors: | , , , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Amsterdam, Netherlands Waltham, MA
William Andrew
2012
|
| Edition: | 2nd ed. |
| Subjects: | |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
MARC
| LEADER | 00000nam a2200000 a 4500 | ||
|---|---|---|---|
| 001 | 96499 | ||
| 003 | MY-KLNDU | ||
| 005 | 20241220012612.0 | ||
| 008 | 131101 2012 ne a bi 000 0 eng d | ||
| 020 | |a 9781437734836 | ||
| 039 | 9 | |a 201405152120 |b zul |c 201401161513 |d azraai |y 201311011542 |z zubir | |
| 040 | |a UPNM | ||
| 090 | |a TS 695 |b .H36 2012 | ||
| 245 | 1 | |a Handbook of sputter deposition technology |b fundamentals and applications for functional thin films, nano-materials and MEMS |c Hideaki Adachi ... [et al.] ; edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera | |
| 250 | |a 2nd ed. | ||
| 260 | |a Amsterdam, Netherlands |a Waltham, MA |b William Andrew |c 2012 | ||
| 300 | |a xii, 644 p. |b ill. |c 24 cm. | ||
| 504 | |a Includes bibliographical references and index | ||
| 505 | |a pt.I. Fundamentals of Sputtering -- 1. Thin films and nanomaterials -- 2. Sputtering phenomena -- 3. Sputtering systems -- pt.II. Theory and Practice: Sputtering Deposition of Functional Thin Films -- 4. Computer stimulation -- 5. Basic process of sputtering deposition 6. Functional thin films -- pt.III. Sputtering Technology for Nanomaterials and Thin Films MEMS -- 7. Ferroelectric thin films -- 8. Thin films MEMS -- 9. Micro-fabrication by sputtering | ||
| 520 | |a This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. | ||
| 592 | |a INN/8895 |b 13/11/13 |c RM520.18 |h Innowawasan | ||
| 650 | 0 | |a Cathode sputtering (Plating process) |v Handbooks, manuals, etc. | |
| 650 | 0 | |a Thin films |v Handbooks, manuals, etc | |
| 700 | 1 | |a Adachi, Hideaki | |
| 700 | 1 | |a Wasa, Kiyotaka | |
| 700 | 1 | |a Kanno, Isaku | |
| 700 | 1 | |a Kotera, Hidetoshi | |
| 999 | |a vtls000050889 |c 96499 |d 96499 | ||