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A guide to hands-on MEMS design and prototyping

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Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabricat...

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Bibliographic Details
Main Author:	Kubby, Joel A.
Format:	Book
Language:	English
Published:	Cambridge, UK Cambridge University Press 2011
Subjects:	Microelectromechanical systems
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