Thin film technology handbook

The most comprehensive source available on the preparation, characterization, and emerging applications of thin film. This book features extensive new advances applied in multichip modules (MCMs), and covers the basic principles and applications of thin film deposition techniques for practical use....

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Bibliographic Details

Main Author:	Elshabini-Riad, Aicha
Other Authors:	Barlow, Fred D.
Format:	Book
Language:	English
Published:	New York, NY McGraw-Hill c1998
Series:	Electronic packaging and interconnection series
Subjects:	Thin film devices > design and construction Thin films Electronic packaging
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