Search Results - "Microelectromechanical systems series"

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  1. 1
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    Post-processing techniques for integrated MEMS by Sedky

    Published 2006
    “…Microelectromechanical systems series…”
    Book

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  2. 2
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    An introduction to microelectromechanical systems engineering by Maluf

    Published 2004
    “…Microelectromechanical systems series…”
    Book

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  3. 3
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    MEMS mechanical sensors

    Published 2004
    “…Artech House microelectromechanical system series…”
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