Chemical mechanical planarization of microelectronic materials by Steigerwald, Joseph M.

Table of Contents: “…Oxide CMP Processes : Mechanisms and Models -- 6. Tungsten and CMP Processes -- 7. Copper CMP -- 8. CMP of Other Materials and New CMP Applications -- 9. …”

Sacrifice zones the front lines of toxic chemical exposure in the United States by Lerner, Steve

Table of Contents: “…Lawrence Island, Alaska : Yupik Eskimos face contaminated water and traditional food supplies near former U.S. military bases -- Greenpoint, New York : giant oil spill spreads beneath Brooklyn neighborhood -- An ongoing puzzle : disease clusters possibly caused by multiple sources of pollution -- Fallon, Nevada : largest U.S. pediatric leukemia cluster near naval air station and tungsten smelter -- Conclusion.…”