Chemical mechanical planarization of microelectronic materials

Chemical Mechanical Planarization (CMP) plays an important role in today's microelectronics industry. With its ability to achieve global planarization, its universality (material insensitivity), its applicability to multimaterial surfaces, and its relative cost-effectiveness, CMP is the ideal p...

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Bibliographic Details

Main Author:	Steigerwald, Joseph M.
Other Authors:	Murarka, S. P., Gutmann, Ronald J.
Format:	Book
Language:	English
Published:	New York Wiley-Interscience 1996
Subjects:	Microelectronics > Materials Grinding and polishing
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