APA (7th ed.) Citation

Steigerwald, J. M., Murarka, S. P., & Gutmann, R. J. (1996). Chemical mechanical planarization of microelectronic materials. Wiley-Interscience.

Chicago Style (17th ed.) Citation

Steigerwald, Joseph M., S. P. Murarka, and Ronald J. Gutmann. Chemical Mechanical Planarization of Microelectronic Materials. New York: Wiley-Interscience, 1996.

MLA (9th ed.) Citation

Steigerwald, Joseph M., et al. Chemical Mechanical Planarization of Microelectronic Materials. Wiley-Interscience, 1996.

Warning: These citations may not always be 100% accurate.