Particle control for semiconductor manufacturing
The trend toward chip designs of ever-decreasing dimensions promises increased importance for particle control partices. "Particle control for semiconductor manufacturing" focuses on submicrometer contaminants that introduce unwanted, unmodeled effected in device performance.
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York, NY
Marcel Dekker
1990
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Perpustakaan Jeneral Tun Ibrahim
| Call Number: |
ref TK 7871.85 .P358 1990 |
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| Copy | On Shelf |