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Particle control for semiconductor manufacturing

The trend toward chip designs of ever-decreasing dimensions promises increased importance for particle control partices. "Particle control for semiconductor manufacturing" focuses on submicrometer contaminants that introduce unwanted, unmodeled effected in device performance.

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Bibliographic Details
Other Authors:	Donovan, R.P
Format:	Book
Language:	English
Published:	New York, NY Marcel Dekker 1990
Subjects:	Semiconductors > design and construction Semiconductors > Defects Particles
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