Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS

This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, d...

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Bibliographic Details

Other Authors:	Adachi, Hideaki, Wasa, Kiyotaka, Kanno, Isaku, Kotera, Hidetoshi
Format:	Book
Language:	English
Published:	Amsterdam, Netherlands Waltham, MA William Andrew 2012
Edition:	2nd ed.
Subjects:	Cathode sputtering (Plating process) > Handbooks, manuals, etc. Thin films > Handbooks, manuals, etc
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