Adachi, H., Wasa, K., Kanno, I., & Kotera, H. (2012). Handbook of sputter deposition technology: Fundamentals and applications for functional thin films, nano-materials and MEMS (2nd ed.). William Andrew.
Chicago Style (17th ed.) CitationAdachi, Hideaki, Kiyotaka Wasa, Isaku Kanno, and Hidetoshi Kotera. Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-materials and MEMS. 2nd ed. Amsterdam, Netherlands Waltham, MA: William Andrew, 2012.
MLA (9th ed.) CitationAdachi, Hideaki, et al. Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-materials and MEMS. 2nd ed. William Andrew, 2012.
Warning: These citations may not always be 100% accurate.