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Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS

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This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, d...

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Bibliographic Details
Other Authors: Adachi, Hideaki, Wasa, Kiyotaka, Kanno, Isaku, Kotera, Hidetoshi
Format: Book
Language:English
Published: Amsterdam, Netherlands Waltham, MA William Andrew 2012
Edition:2nd ed.
Subjects:
Cathode sputtering (Plating process) > Handbooks, manuals, etc.
Thin films > Handbooks, manuals, etc
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Table of Contents:
  • pt.I. Fundamentals of Sputtering
  • 1. Thin films and nanomaterials
  • 2. Sputtering phenomena
  • 3. Sputtering systems
  • pt.II. Theory and Practice: Sputtering Deposition of Functional Thin Films
  • 4. Computer stimulation
  • 5. Basic process of sputtering deposition 6. Functional thin films
  • pt.III. Sputtering Technology for Nanomaterials and Thin Films MEMS
  • 7. Ferroelectric thin films
  • 8. Thin films MEMS
  • 9. Micro-fabrication by sputtering

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