Foundations of MEMS

[This book] is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by inco...

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Bibliographic Details

Main Author:	Liu, Chang (Author)
Format:	Book
Language:	English
Published:	Harlow, Essex Pearson Education Limited [2012]
Edition:	Second edition; international edition
Subjects:	Microelectromechanical systems
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