Foundations of MEMS
[This book] is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by inco...
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Harlow, Essex
Pearson Education Limited
[2012]
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| Edition: | Second edition; international edition |
| Subjects: | |
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| Summary: | [This book] is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology - all in a time-efficient and methodical manner. A wealth of examples and problems solidify students' understanding of abstract concepts and provide ample opportunities for practicing critical thinking. |
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| Physical Description: | 576 pages illustrations 24 cm |
| Bibliography: | Includes bibliographical references and index |
| ISBN: | 9780273752240 |