Foundations of MEMS
[This book] is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by inco...
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Harlow, Essex
Pearson Education Limited
[2012]
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| Edition: | Second edition; international edition |
| Subjects: | |
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| 100 | 1 | |a Liu, Chang |e author | |
| 245 | 1 | 0 | |a Foundations of MEMS |c Chang Liu |
| 250 | |a Second edition; international edition | ||
| 264 | 1 | |a Harlow, Essex |b Pearson Education Limited |c [2012] | |
| 264 | 4 | |c ©2012 | |
| 300 | |a 576 pages |b illustrations |c 24 cm | ||
| 336 | |a text |2 rdacontent | ||
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| 338 | |a volume |2 rdacarrier | ||
| 504 | |a Includes bibliographical references and index | ||
| 505 | 0 | |a Introduction -- First-Pass Introduction to Microfabrication -- Review of Essential Electrical and Mechanical Concepts -- Electrostatic Sensing and Actuation -- Thermal Sensing and Actuation -- Piezoresistive Sensors -- Piezoelectric Sensing and Actuation -- Magnetic Actuation -- Summary of Sensing and Actuation Methods -- Bulk Micromachining and Silicon Anisotropic Etching -- Surface Micromachining -- Process Synthesis: Putting It all Together -- Polymer MEMS -- Micro Fluidics Applications -- Case Studies of Selected MEMS Products | |
| 520 | |a [This book] is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology - all in a time-efficient and methodical manner. A wealth of examples and problems solidify students' understanding of abstract concepts and provide ample opportunities for practicing critical thinking. | ||
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| 650 | 0 | |a Microelectromechanical systems | |
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