Foundations of MEMS
[This book] is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by inco...
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| Format: | Book |
| Language: | English |
| Published: |
Harlow, Essex
Pearson Education Limited
[2012]
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| Edition: | Second edition; international edition |
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Table of Contents:
- Introduction
- First-Pass Introduction to Microfabrication
- Review of Essential Electrical and Mechanical Concepts
- Electrostatic Sensing and Actuation
- Thermal Sensing and Actuation
- Piezoresistive Sensors
- Piezoelectric Sensing and Actuation
- Magnetic Actuation
- Summary of Sensing and Actuation Methods
- Bulk Micromachining and Silicon Anisotropic Etching
- Surface Micromachining
- Process Synthesis: Putting It all Together
- Polymer MEMS
- Micro Fluidics Applications
- Case Studies of Selected MEMS Products