Handbook of optical metrology principles and applications

This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters-nearly 100 pages-on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video...

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Bibliographic Details

Other Authors:	Yoshizawa, Toru 1939- (Editor)
Format:	Book
Language:	English
Published:	Boca Raton, FL Taylor & Francis, CRC Press [2015]
Edition:	Second edition
Subjects:	Optical measurements > Handbooks, manuals, etc Metrology > Handbooks, manuals, etc
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