Handbook of optical metrology principles and applications
This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters-nearly 100 pages-on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video...
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boca Raton, FL
Taylor & Francis, CRC Press
[2015]
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| Edition: | Second edition |
| Subjects: | |
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| Summary: | This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters-nearly 100 pages-on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology |
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| Physical Description: | xiii, 905 pages illustrations 25 cm |
| Bibliography: | Includes bibliographical references and index |
| ISBN: | 9781466573598 (alk.paper) |