Handbook of optical metrology principles and applications
This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters-nearly 100 pages-on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video...
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boca Raton, FL
Taylor & Francis, CRC Press
[2015]
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| Edition: | Second edition |
| Subjects: | |
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| 008 | 221104t20152015flua bi 001 0 eng d | ||
| 020 | |a 9781466573598 (alk.paper) | ||
| 039 | 9 | |a 202211041135 |b VLOAD |c 201601181457 |d faezah |y 201512091933 |z syarifuddin | |
| 040 | |a UPNM |b eng |c UPNM |e rda | ||
| 090 | |a QC 367 |b .H363 2015 | ||
| 245 | 0 | 0 | |a Handbook of optical metrology |b principles and applications |c edited by Toru Yoshizawa |
| 250 | |a Second edition | ||
| 264 | 1 | |a Boca Raton, FL |b Taylor & Francis, CRC Press |c [2015] | |
| 264 | 4 | |c © 2015 | |
| 300 | |a xiii, 905 pages |b illustrations |c 25 cm | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a unmediated |2 rdamedia | ||
| 338 | |a volume |2 rdacarrier | ||
| 504 | |a Includes bibliographical references and index | ||
| 505 | 0 | |a Chapter 1: Light Sources --Chapter 2: Lenses, Prisms, and Mirrors --Chapter 3: Optoelectronic Sensors -- Chapter 4: Optical Devices and Optomechanical Elements -- Chapter 5: Propagation of Light -- Chapter 6: Interferometry --Chapter 7: Holography -- Chapter 8: Speckle Methods and Applications --Chapter 9: Moir©♭ Metrology --Chapter 10: Optical Heterodyne Measurement Method --Chapter 11: Diffraction --Chapter 12: Light Scattering --Chapter 13: Polarization --Chapter 14: Near-Field Optics --Chapter 15: Length and Size --Chapter 16: Displacement --Chapter 17: Straightness and Alignment --Chapter 18: Flatness; -- Chapter 19: Surface Profilometry --Chapter 20: Three-Dimensional Shape Measurement --Chapter 21: Fringe Analysis-- Chapter 22: Photogrammetry -- Chapter 23: Optical Methods in Solid Mechanics --Chapter 24: Optical Methods in Flow Measurement-- Chapter 25: Polarimetry -- Chapter 26: Birefringence Measurement-- Chapter 27: Ellipsometry --Chapter 28: Optical Thin Film and Coatings --Chapter 29: Film Surface and Thickness Profilometry-- Chapter 30: Optical Coherence Tomography for Industrial Applications --Chapter 31: Interference Microscopy for Surface Structure Analysis-- Chapter 32: Noncontact Dimensional and Profile Metrology by Video Measurement --Chapter 33: Optical Metrology in Manufacturing Technology --Chapter 34: On-Machine Measurements | |
| 520 | |a This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters-nearly 100 pages-on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology | ||
| 592 | |a INV/98508 |b 11/01/2016 |c RM 695.41 |h YUHA | ||
| 650 | 0 | |a Optical measurements |v Handbooks, manuals, etc | |
| 650 | 0 | |a Metrology |v Handbooks, manuals, etc | |
| 700 | 1 | |a Yoshizawa, Toru |d 1939- |e editor | |
| 999 | |a vtls000056086 |c 98601 |d 98601 | ||


