Handbook of optical metrology principles and applications

This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters-nearly 100 pages-on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video...

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Bibliographic Details
Other Authors: Yoshizawa, Toru 1939- (Editor)
Format: Book
Language:English
Published: Boca Raton, FL Taylor & Francis, CRC Press [2015]
Edition:Second edition
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245 0 0 |a Handbook of optical metrology  |b principles and applications  |c edited by Toru Yoshizawa 
250 |a Second edition 
264 1 |a Boca Raton, FL  |b Taylor & Francis, CRC Press  |c [2015] 
264 4 |c © 2015 
300 |a xiii, 905 pages  |b illustrations  |c 25 cm 
336 |a text  |2 rdacontent 
337 |a unmediated  |2 rdamedia 
338 |a volume  |2 rdacarrier 
504 |a Includes bibliographical references and index 
505 0 |a Chapter 1: Light Sources --Chapter 2: Lenses, Prisms, and Mirrors --Chapter 3: Optoelectronic Sensors -- Chapter 4: Optical Devices and Optomechanical Elements -- Chapter 5: Propagation of Light -- Chapter 6: Interferometry --Chapter 7: Holography -- Chapter 8: Speckle Methods and Applications --Chapter 9: Moir©♭ Metrology --Chapter 10: Optical Heterodyne Measurement Method --Chapter 11: Diffraction --Chapter 12: Light Scattering --Chapter 13: Polarization --Chapter 14: Near-Field Optics --Chapter 15: Length and Size --Chapter 16: Displacement --Chapter 17: Straightness and Alignment --Chapter 18: Flatness; -- Chapter 19: Surface Profilometry --Chapter 20: Three-Dimensional Shape Measurement --Chapter 21: Fringe Analysis-- Chapter 22: Photogrammetry -- Chapter 23: Optical Methods in Solid Mechanics --Chapter 24: Optical Methods in Flow Measurement-- Chapter 25: Polarimetry -- Chapter 26: Birefringence Measurement-- Chapter 27: Ellipsometry --Chapter 28: Optical Thin Film and Coatings --Chapter 29: Film Surface and Thickness Profilometry-- Chapter 30: Optical Coherence Tomography for Industrial Applications --Chapter 31: Interference Microscopy for Surface Structure Analysis-- Chapter 32: Noncontact Dimensional and Profile Metrology by Video Measurement --Chapter 33: Optical Metrology in Manufacturing Technology --Chapter 34: On-Machine Measurements 
520 |a This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters-nearly 100 pages-on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology 
592 |a INV/98508  |b 11/01/2016  |c RM 695.41  |h YUHA 
650 0 |a Optical measurements  |v Handbooks, manuals, etc 
650 0 |a Metrology  |v Handbooks, manuals, etc 
700 1 |a Yoshizawa, Toru  |d 1939-  |e editor 
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