Handbook of optical metrology principles and applications
This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters-nearly 100 pages-on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video...
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| Format: | Book |
| Language: | English |
| Published: |
Boca Raton, FL
Taylor & Francis, CRC Press
[2015]
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| Edition: | Second edition |
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Table of Contents:
- Chapter 1: Light Sources
- Chapter 2: Lenses, Prisms, and Mirrors
- Chapter 3: Optoelectronic Sensors
- Chapter 4: Optical Devices and Optomechanical Elements
- Chapter 5: Propagation of Light
- Chapter 6: Interferometry
- Chapter 7: Holography
- Chapter 8: Speckle Methods and Applications
- Chapter 9: Moir©♭ Metrology
- Chapter 10: Optical Heterodyne Measurement Method
- Chapter 11: Diffraction
- Chapter 12: Light Scattering
- Chapter 13: Polarization
- Chapter 14: Near-Field Optics
- Chapter 15: Length and Size
- Chapter 16: Displacement
- Chapter 17: Straightness and Alignment
- Chapter 18: Flatness;
- Chapter 19: Surface Profilometry
- Chapter 20: Three-Dimensional Shape Measurement
- Chapter 21: Fringe Analysis-- Chapter 22: Photogrammetry
- Chapter 23: Optical Methods in Solid Mechanics
- Chapter 24: Optical Methods in Flow Measurement-- Chapter 25: Polarimetry
- Chapter 26: Birefringence Measurement-- Chapter 27: Ellipsometry
- Chapter 28: Optical Thin Film and Coatings
- Chapter 29: Film Surface and Thickness Profilometry-- Chapter 30: Optical Coherence Tomography for Industrial Applications
- Chapter 31: Interference Microscopy for Surface Structure Analysis-- Chapter 32: Noncontact Dimensional and Profile Metrology by Video Measurement
- Chapter 33: Optical Metrology in Manufacturing Technology
- Chapter 34: On-Machine Measurements